|VSI Co. Ltd. Specializes in the manufacture and development of Vacuum products include Ion beam sources, RHEED systems, Feedthroughs, Acceleration columns, Ion milling and deposition system, FVAS coating system, and all kinds of power supplies. |
Our high-quality products are based on our long experience in vacuum science and an ISO9001:2000 certified company, we devote all our efforts continuously to research and endeavor to produce only the best products.
[FVAS(Filtered Vacuum Arc Source) Coating]
* Pure Plasma Beam Deposition
* Adjustable Energy of Coating Species
* Off-Plane Double Bend - Obtain particle free deposition - Improve plasma transport efficiency
* Innovative Anode/Cathode Design - Produce stable arc and plasma beam
* Robust Target Surface Adjustment - Prolong production up-time
* Room Temperature Deposition
* Fully Automated Operation
* Real Time Process Monitoring
* Dynamic Real Time Compensation(Optional)- Excellent process repeatability
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